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Footprint
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850mm(W)*1100mm(D)*1760mm(H)
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Chamber
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500mm(W)*500mm(D)*500mm(H)
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Weight
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880kg
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Facilities
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3Ψ220V×60Hz×4w，30A
Compressed air： Reaction gas： |
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System control software
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PLC touch panel or PC based system controller
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Gas flow system
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2 mass flow controllers
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Vacuum pump
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Dry pump
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Reactants
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O2、CF4
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Telescopic stage
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Easy loading accessory
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Cell clamp
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Cell stack holder with stacking accessory
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Consumable parts
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NO
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